Robot Application
Semiconductor Fab Transport
Autonomous mobile robots transport wafer cassettes, reticles, and cleanroom materials in semiconductor fabrication facilities with strict contamination control.
Semiconductor fabs require sub-class 1 cleanroom environments where human presence increases contamination risk. AMRs with cleanroom-rated designs transport FOUPs (Front Opening Unified Pods), reticle boxes, and spare parts between lithography, etch, and deposition tools. Robots integrate with MES systems for lot tracking and minimize particle generation through sealed drivetrains and low-shedding materials. Deployments at TSMC, Intel, and Samsung fabs demonstrate 24/7 material flow with reduced wafer handling errors.